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Article

Research Paper

Journal of the Optical Society of Korea 2014; 18(5): 495-499

Published online October 25, 2014 https://doi.org/10.3807/JOSK.2014.18.5.495

Copyright © Optical Society of Korea.

Determining Two-Sided Surface Profiles of Micro-Optical Elements Using a Dual-Wavelength Digital Holographic Microscope With Liquids

Hong Seok Lee1, Sanghoon Shin2, Heonjoo Lee3, and Younghun Yu3

1Department of Physics, Chonbuk National University; 2KPS; 3Department of Physics, Jeju National University

Received: June 17, 2014; Revised: September 25, 2014; Accepted: September 25, 2014

Abstract

In this paper, a method is proposed for simultaneously measuring the front and back surface profiles of transparent micro-optical components. The proposed method combines a dual-wavelength digital holographic microscope with liquids to record holograms at different wavelengths, and then numerically reconstructs the three-dimensional phase information to image the front and back sides of the sample. A theoretical model is proposed to determine the surface information, and imaging of an achromatic lens is demonstrated experimentally. Unlike conventional interferometry, our proposed method supports nondestructive measurement and direct observation of both front and back profiles of micro-optical elements.

Keywords: Diffractive optics, Holography, Image reconstruction,

OCIS codes: 090.0090; 100.3010; 050.1970