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Research Paper

Journal of the Optical Society of Korea 2014; 18(4): 335-340

Published online August 25, 2014 https://doi.org/10.3807/JOSK.2014.18.4.335

Copyright © Optical Society of Korea.

Error-immune Algorithm for Absolute Testing of Rotationally Asymmetric Surface Deviation

Yanwei Zhang, Dongqi Su, Le Li, Yongxin Sui, and Huaijiang Yang

State Key Laboratory of Applied Optics, Changchun Institute of Optic, Fine Mechanics and Physics, Chinese Academy of Sciences

Received: May 9, 2014; Revised: July 2, 2014; Accepted: July 2, 2014

Abstract

Based on Zernike polynomial fitting, we propose an algorithm believed to be new for interferometric measurements of rotationally asymmetric surface deviation of optics. This method tests and calculates each angular surface by choosing specified rotation angles with lowest error. The entire figure can be obtained by superimposing these sub-surfaces. Simulation and experiment studies for verifying the proposed algorithm are presented. The results show that the accuracy of the proposed method is higher than single-rotation algorithm and almost comparable to the rotation-averaging algorithm with fewer rotation measurements. The new algorithm can achieve a balance between the efficiency and accuracy.

Keywords: Absolute testing, Rotationally asymmetric surface errors, Error-immune, Zernike polynomials,

OCIS codes: 120.6650; 120.3180; 120.4800

Optical Society of Korea

Current Optics
and Photonics


Min-Kyo Seo,
Editor-in-chief

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